FFKM is the most chemically inert elastomer available. It resists almost every solvent, acid, base and oxidiser, survives plasma and ozone, and holds service to 320 °C — performance that comes at a price measured in hundreds of euros per kilogram. It is specified where a seal failure means a contaminated process line or an unplanned shutdown: semiconductor chambers, chemical reactors, aerospace fuel systems.

Custom FFKM Perfluoroelastomer Moulding — Semiconductor wafer processing chamber seals

70 – 90 Shore AHardness range
-20 to +320 °CService temperature
10 – 18 MPaTensile strength

Typical values for standard moulding grades. Exact figures depend on the specific compound or grade — confirm against your drawing before quoting.

Key properties

プロパティ Typical value
Hardness range 70 – 90 Shore A
Service temperature -20 to +320 °C
Tensile strength 10 – 18 MPa
Elongation at break 100 – 250 %
Compression set (22 h / 200 °C) 15 – 30 %
Chemical resistance Near-universal, including plasma and oxidisers

Values are typical for unfilled moulding grades at 23 °C unless stated. Glass-filled and specialty grades differ.

Typical applications

  • Semiconductor wafer processing chamber seals
  • Chemical reactor and pump seals
  • Aerospace fuel and hydraulic seals
  • Analytical instrument and chromatography seals
  • Pharmaceutical process seals requiring high purity

Processing notes

  • Cost is dominated by the compound, often hundreds of euros per kilogram. Keep the seal cross-section as small as the gland allows.
  • FFKM is soft and tears easily. Mould design needs generous radii, low demould forces and careful ejection.
  • Not all FFKM grades are equal. Semiconductor grades are formulated for low particle and metal-ion release; a general-purpose FFKM will fail cleanliness specifications.
  • Lead time is driven by compound availability, not moulding. Confirm the grade with us before committing to a delivery date.
Tooling, not just material. Every material above behaves differently in the tool — shrinkage, gate position, cooling and ejection all change. We review the DFM against the specific grade before the tool is cut, so the first shot is a sample, not a surprise.

Frequently asked questions

Why is FFKM so expensive?

The base polymer is made in small volumes from perfluorinated monomers, and curing it requires specialty crosslinkers. The material cost is the price of chemical universality — there is no cheaper substitute that performs the same.

Can you supply FFKM for a semiconductor chamber?

Yes, in low-particle grades with the accompanying extractables data. Send the cleanliness specification and the plasma chemistry; the grade selection depends on both.

Related materials

← All Rubber & Silicone Solutions

Send us your FFKM Perfluoroelastomer drawing

Upload a 3D model or a 2D drawing and we will come back with a DFM review, a tooling cost and a piece price — usually within two working days.

Request a quote

jaJA

クイック見積もり

図面および詳細要件を下記までお送りください。

エミアル:[email protected]

または下記のお問い合わせフォームにご記入ください: